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Thermal property of zinc oxide coating films with controlled crystal preferred orientation


M. Goto1, Y. Xu2, A. Kasahara1 and M. Tosa1

1Materials Reliability Center, National Institute for Materials Science, Japan
2Materials Database Station, National Institute for Materials Science, Japan

Keywords: zinc oxide, sputter coating, thin films
property: crystal preferred orientation
material: ZnO

Zinc oxide coating films have caught much attention due to their wide application fields. Recently ZnO coating is expected to be used as low frictional coating at high temperature atmosphere. It is desired that both of the thermal and frictional properties of ZnO coatings are optimized. The crystal preferred orientation of zinc oxide coating films on glass substrates was precisely controlled by a combinatorial sputter-coating system (COSCOS). The crystal preferred orientation of ZnO coating films was analyzed by X-ray diffraction spectroscopy. The thermal conductivity of the films was measured by an AC calorimetric method. The relationship between the crystal preferred orientation and the thermal conductivity was discussed. The present work was supported by a Grant-in-Aid for Scientific Research (A) (21246030) from the Ministry of Education, Culture, Sports, Science and Technology, Japan.


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